Digital in-line holography on amplitude and phase objects prepared with electron beam lithography.

Summary, in English

We report on the fabrication and characterization of amplitude and phase samples consisting of well defined Au or Al features formed on ultrathin silicon nitride membranes. The samples were manufactured using electron beam lithography, metallization and a lift-off technique, which allow precise lateral control and thickness of the metal features. The fabricated specimens were evaluated by conventional microscopy, atomic force microscopy and with the digital in-line holography set-up at the Lund Laser Centre. The latter uses high-order harmonic generation as a light source, and is capable of recovering both the shape and phase shifting properties of the samples. We report on the details of the sample production and on the imaging tests with the holography set-up.

• Author: Jörg Schwenke; Eleonora Lorek; Rafal Rakowski; Xinkui He; Anders Kvennefors; Anders Mikkelsen; Piotr Rudawski; Christoph Heyl; Ivan Maximov; Sven-Göran Pettersson; Anders Persson; Anne L'Huillier
• Department/s: MAX IV Laboratory; Atomic Physics; Solid State Physics; Synchrotron Radiation Research; Department of Physics; NanoLund: Centre for Nanoscience
• Publishing year: 2012
• Language: English
• Pages: 196-201
• Publication/Series: Journal of Microscopy
• Volume: 247
• Issue: 2
• Links: http://dx.doi.org/10.1111/j.1365-2818.2012.03632.x
• Document type: Journal article
• Publisher: Wiley-Blackwell
• Topic: Atom and Molecular Physics and Optics; Nano-technology
• Status: Published
• ISBN/ISSN/Other: ISSN: 0022-2720